The AT-950 industrial grade MEMS tri-axis accelerometer adopts advanced silicon-based MEMS technology and a compact ceramic package design, featuring high stability, low noise, low temperature drift, wide measurement range, and excellent long-term reliability.
رقم القطعة، :
AT-950الطلب (الحد الأدنى للكمية) :
1Product Series and Parameters
| Parameters | MEMS Accelerometer | Unit | |
| Product code | AT-950-40 | AT-950-50 | |
| Encapsulation | CLCC14 | ||
| Dimension | 6*6*2 | mm | |
| Axial | X, Y, Z | ||
| Range | ±40 | ±50 | g |
| Scale nonlinearity | <1000(X,Y), <5000(Z) | <1000ppm(@20g); >3000ppm(@50g) |
ppm (IEEE Norm , of full scale) |
| Bandwidth 3db (adjustable) | ≥200 | ≥200 | Hz |
| Delayed | <1.5 | <1.5 | ms |
| Zero bias (room temperature) | ±1 (X,Y); ±1.5 (Z) | ±1 (X,Y); ±1.5 (Z) | mg(@room temperature) |
| Zero bias temperature drift | <5 | <5 | mg |
| Zero-bias temperature hysteresis | <1.5 | <2 | mg |
| Zero bias stability (1s, smooth @room temperature) | 100 (X, Y), 150 (Z) | 100 (X, Y), 150 (Z) | ug |
| Zero bias stability (10s, smooth @room temperature) | 75 (X, Y), 100 (Z) | 75 (X, Y), 100 (Z) | ug |
| Zero bias stability (Allan) | 20 (X, Y), 25 (Z) | 25 (X, Y), 30 (Z) | ug |
| Switch repeatability 1σ | 50 (X, Y), 75 (Z) | 50 (X, Y), 75 (Z) | ug |
| Scale factor | 12800±13 | 10240±10 | Lsb/g(@room temeprature) |
| Scale temperature coefficient | 100 | 100 | ppm/°C |
| Residual error after scaled temperature compensation | 100 | 100 | ppm(second-order compensation)1σ |
| Start time | <200 | <200 | ms |
| ODR (adjustable) | 4K | 4K | Hz |
| Shock on power | 3000 | 3000 | g |
| Shock off power | 3000 | 3000 | g |
| Vibration rectification error (6grms) | 1 (X, Y), 3 (Z) | 1 (X, Y), 3 (Z) | mg/grms |
| Operating temperature | -45 ~ +85 | -45 ~ +85 | °C |
| Power voltage | 3.3±10% | 3.3±5% | V |
| Current | <600 | <600 | uA |
| Communication interface | SPI | SPI | |
Production process
Product dimension


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